Performance analysis and characterisation of micro-nanopositioning systems
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منابع مشابه
Calibration of Nanopositioning Stages
Accuracy is one of the most important criteria for the performance evaluation of microand nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications. However, their positioning accuracy and repeatability are not well known and difficult to guarantee, which induces many drawbacks for many application...
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INTRODUCTION Micro Electro Mechanical Systems (MEMS) based micro-positioning stages are critically important in many micro/nano manipulation and manufacturing applications. Such stages have been extensively used in micro-force sensors, scanning probe microscopy and micro optical lens scanners [1-4]. While there is no unique definition for a micro-positioning stage, it generally refers to a syst...
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تاریخ انتشار 2017